🗊Презентация Microelectromechanical Systems (MEMS) An introduction

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Microelectromechanical Systems (MEMS) An introduction, слайд №1Microelectromechanical Systems (MEMS) An introduction, слайд №2Microelectromechanical Systems (MEMS) An introduction, слайд №3Microelectromechanical Systems (MEMS) An introduction, слайд №4Microelectromechanical Systems (MEMS) An introduction, слайд №5Microelectromechanical Systems (MEMS) An introduction, слайд №6Microelectromechanical Systems (MEMS) An introduction, слайд №7Microelectromechanical Systems (MEMS) An introduction, слайд №8Microelectromechanical Systems (MEMS) An introduction, слайд №9Microelectromechanical Systems (MEMS) An introduction, слайд №10Microelectromechanical Systems (MEMS) An introduction, слайд №11Microelectromechanical Systems (MEMS) An introduction, слайд №12Microelectromechanical Systems (MEMS) An introduction, слайд №13Microelectromechanical Systems (MEMS) An introduction, слайд №14Microelectromechanical Systems (MEMS) An introduction, слайд №15Microelectromechanical Systems (MEMS) An introduction, слайд №16Microelectromechanical Systems (MEMS) An introduction, слайд №17Microelectromechanical Systems (MEMS) An introduction, слайд №18Microelectromechanical Systems (MEMS) An introduction, слайд №19Microelectromechanical Systems (MEMS) An introduction, слайд №20Microelectromechanical Systems (MEMS) An introduction, слайд №21Microelectromechanical Systems (MEMS) An introduction, слайд №22Microelectromechanical Systems (MEMS) An introduction, слайд №23Microelectromechanical Systems (MEMS) An introduction, слайд №24Microelectromechanical Systems (MEMS) An introduction, слайд №25Microelectromechanical Systems (MEMS) An introduction, слайд №26Microelectromechanical Systems (MEMS) An introduction, слайд №27Microelectromechanical Systems (MEMS) An introduction, слайд №28Microelectromechanical Systems (MEMS) An introduction, слайд №29Microelectromechanical Systems (MEMS) An introduction, слайд №30Microelectromechanical Systems (MEMS) An introduction, слайд №31Microelectromechanical Systems (MEMS) An introduction, слайд №32Microelectromechanical Systems (MEMS) An introduction, слайд №33Microelectromechanical Systems (MEMS) An introduction, слайд №34Microelectromechanical Systems (MEMS) An introduction, слайд №35Microelectromechanical Systems (MEMS) An introduction, слайд №36
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Microelectromechanical Systems (MEMS) An introduction Jr-Lung (Eddie) Lin Department of Mechanical and Automation Engineering, I-Shuo University Email: ljl@isu.edu.tw
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Microelectromechanical Systems (MEMS) An introduction Jr-Lung (Eddie) Lin Department of Mechanical and Automation Engineering, I-Shuo University Email: ljl@isu.edu.tw

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Outline Introduction Applications Passive structures Sensors Actuators Future Applications MEMS micromachining technology Bulk micromachining Surface micromachining LIGA Wafer bonding Thin film MEMS Motivation Microresonators MEMS resources Conclusions
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Outline Introduction Applications Passive structures Sensors Actuators Future Applications MEMS micromachining technology Bulk micromachining Surface micromachining LIGA Wafer bonding Thin film MEMS Motivation Microresonators MEMS resources Conclusions

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What are MEMS? (Micro-electromechanical Systems) Fabricated using micromachining technology Used for sensing, actuation or are passive micro-structures Usually integrated with electronic circuitry for control and/or information processing
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What are MEMS? (Micro-electromechanical Systems) Fabricated using micromachining technology Used for sensing, actuation or are passive micro-structures Usually integrated with electronic circuitry for control and/or information processing

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3-D Micromachined Structures
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3-D Micromachined Structures

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3-D Micromachined Structures
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3-D Micromachined Structures

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Applications: Passive Structures
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Applications: Passive Structures

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Applications: Sensors Pressure sensor: Piezoresistive sensing Capacitive sensing Resonant sensing Application examples: Manifold absolute pressure (MAP) sensor Disposable blood pressure sensor (Novasensor)
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Applications: Sensors Pressure sensor: Piezoresistive sensing Capacitive sensing Resonant sensing Application examples: Manifold absolute pressure (MAP) sensor Disposable blood pressure sensor (Novasensor)

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Piezoresistive Pressure Sensors
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Piezoresistive Pressure Sensors

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Piezoresistive Pressure Sensors
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Piezoresistive Pressure Sensors

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Applications: Sensors Acceleration Air bag crash sensing Seat belt tension Automobile suspension control Human activity for pacemaker control Vibration Engine management Security devices Monitoring of seismic activity Angle of inclination Vehicle stability and roll
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Applications: Sensors Acceleration Air bag crash sensing Seat belt tension Automobile suspension control Human activity for pacemaker control Vibration Engine management Security devices Monitoring of seismic activity Angle of inclination Vehicle stability and roll

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Accelerometers
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Accelerometers

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Accelerometers
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Accelerometers

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Capacitive Accelerometers
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Capacitive Accelerometers

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Applications: Actuators Texas Instruments Digital Micromirror DeviceTM
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Applications: Actuators Texas Instruments Digital Micromirror DeviceTM

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Digital Micromirror Device
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Digital Micromirror Device

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Digital Micromirror Device
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Digital Micromirror Device

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Some future applications Biological applications: Microfluidics Lab-on-a-Chip Micropumps Resonant microbalances Micro Total Analysis systems Mobile communications: Micromechanical resonator for resonant circuits and filters Optical communications: Optical switching
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Some future applications Biological applications: Microfluidics Lab-on-a-Chip Micropumps Resonant microbalances Micro Total Analysis systems Mobile communications: Micromechanical resonator for resonant circuits and filters Optical communications: Optical switching

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Microfluidics / DNA Analysis
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Microfluidics / DNA Analysis

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Basic microfabrication technologies Deposition Chemical vapor deposition (CVD/PECVD/LPCVD) Epitaxy Oxidation Evaporation Sputtering Spin-on methods Etching Wet chemical etching Istropic Anisotropic Dry etching Plasma etch Reactive Ion etch (RIE, DRIE) Patterning Photolithography X-ray lithography
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Basic microfabrication technologies Deposition Chemical vapor deposition (CVD/PECVD/LPCVD) Epitaxy Oxidation Evaporation Sputtering Spin-on methods Etching Wet chemical etching Istropic Anisotropic Dry etching Plasma etch Reactive Ion etch (RIE, DRIE) Patterning Photolithography X-ray lithography

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Bulk micromachining
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Bulk micromachining

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Bulk micromachining
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Bulk micromachining

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Bulk micromachining: Pressure sensors
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Bulk micromachining: Pressure sensors

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Surface Micromachining
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Surface Micromachining

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Surface Micromachining
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Surface Micromachining

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Surface Micromachining
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Surface Micromachining

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Surface Micromachining
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Surface Micromachining

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LIGA – X-ray Lithography, Electroplating (Galvanoformung), Molding (Abformung)
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LIGA – X-ray Lithography, Electroplating (Galvanoformung), Molding (Abformung)

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LIGA
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LIGA

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Wafer bonding- Anodic
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Wafer bonding- Anodic

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Summary: MEMS fabrication MEMS technology is based on silicon microelectronics technology Main MEMS techniques Bulk micromachining Surface micromachining LIGA and variations Wafer bonding
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Summary: MEMS fabrication MEMS technology is based on silicon microelectronics technology Main MEMS techniques Bulk micromachining Surface micromachining LIGA and variations Wafer bonding

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Thin-film MEMS
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Thin-film MEMS

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Surface micromachining on glass
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Surface micromachining on glass

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Electrostatic Actuation
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Electrostatic Actuation

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Optical detection
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Optical detection

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Resonance frequency
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Resonance frequency

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MEMS Resources
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MEMS Resources

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